Vertical Type
A transfer robot for transporting and loading wafers in the semiconductor manufacturing process, characterized by precise position control and high reliability/precision.
- Support Wafers up to 12 inches
- Enhanced Rigidity and Speed with a Slide Structure (Improve straightness and speed with a slide structure)
- Arm Stroke : 480mm
- Z-Axis Option (Low Pass Line and long Stroke response is possible) : Stroke & Type (Telescopic type, Belt, Ball Screw, etc.)
- Driving axis option : Stroke &Type (Linear, Belt, Bass Screw, Rack Pinion, etc.)
Linear Type
A transfer robot for transporting and loading wafers in the semiconductor manufacturing process, characterized by precise position control and high reliability/precision.
- Support Wafers up to 12 inches
- Enhanced Rigidity and Speed with a Slide Structure (Improve straightness and speed with a slide structure)
- Arm Stroke : 480mm
- Z-Axis Option (Low Pass Line and long Stroke response is possible) : Stroke & Type (Telescopic type, Belt, Ball Screw, etc.)
- Driving axis option : Stroke &Type (Linear, Belt, Bass Screw, Rack Pinion, etc.)
Standard Robot
A transfer robot for transporting and loading wafers in the semiconductor manufacturing process, characterized by precise position control and high reliability/precision.
- Support Wafers up to 12 inches
- Stroke response is possible with a minimum rotation radius by securing various link arm sizes (single/dual)
* 100mm, 130mm, 150mm, 165mm, 175mm, 250mm
- Minimum rotation radius is implemented by applying a link arm optimized for wafer size
- Z-Axis Option (Low Pass Line and long Stroke response is possible) : Stroke & Type (Telescopic type, Belt, Ball Screw, etc.)
- Driving axis option : Stroke &Type (Linear, Belt, Bass Screw, Rack Pinion, etc.)
Reverse Robot
A transfer robot for transporting and loading wafers in the semiconductor manufacturing process, characterized by precise position control and high reliability/precision. The two-stage telescopic method has a horizontal inversion function for the body and hand.
- Support Wafers up to 12 inches
- Flip Stroke : 0~180°
- Z-Axis Option (Low Pass Line and long Stroke response is possible) : Stroke & Type (Telescopic type, Belt, Ball Screw, etc.)
- Driving axis option : Stroke &Type (Linear, Belt, Bass Screw, Rack Pinion, etc.)
Telescopic Robot
A transfer robot for transporting and loading wafers in the semiconductor manufacturing process, characterized by precise position control and high reliability/precision.
- Support Wafers up to 12 inches
- The two-stage telescopic method
-- Stroke response is possible with a minimum rotation radius by securing various link arm sizes (single/dual)
* 100mm, 130mm, 150mm, 165mm, 175mm, 250mm
- Minimum rotation radius is implemented by applying a link arm optimized for wafer size
- Z-Axis Option (Low Pass Line and long Stroke response is possible) : Stroke & Type (Telescopic type, Belt, Ball Screw, etc.)
- Driving axis option : Stroke &Type (Linear, Belt, Bass Screw, Rack Pinion, etc.)
